Witryna1 lut 2024 · Ruthenium is a multivalence rare metal element, hard, brittle, and in light grey. It is a member of platinum group metal [78], [79], [80]. Despite the fact that ruthenium is one of the most rare metal and that their content in earth crust is only one in a billion, ruthenium is one of the cheapest metal in platinum group, even though … WitrynaImec is working on a barrier-less cobalt solution with dense low-k iILD materials, electromigration performance is good but without a barrier cobalt does intermix with …

Process Engineer, ALD CVD Thin film deposition - LinkedIn

WitrynaAtomic layer deposition of ruthenium is studied as a barrierless metallization solution for future sub-10 nm interconnect technology nodes. We demonstrate the void-free filling in sub-10 nm wide single damascene lines using an ALD process in combination with 2.5 Å of ALD TiN interface and postdeposition annealing. At such small dimensions, the … WitrynaCD, with 50 dies per wafer, to perform a PSD analysis, based on IMEC roughness protocol [4]. Figure 3: Direct Ruthenium Etch—single level damascene process flow (used for this work) Figure 4: Post-Ruthenium etch geometry, and materials under study. Key metrology target parameters are illustrated in a 3D view Proc. of SPIE Vol. 11325 … cycloplegics and mydriatics

Xiangyu WU imec, Leuven Research profile

WitrynaImec, Kapeldreef 75, 3001 Leuven, Belgium. Search for more papers by this author. Hubert Hody, Hubert Hody. ... During the initial stages of 1-(ethylbenzyl)-1,4-(ethylcyclohexadienyl)ruthenium and oxygen (EBECHRu/O 2) atomic layer deposition (ALD) on dielectrics, Ru particles are too small to catalytically dissociate oxygen, and … Witryna18 lip 2024 · At ASD2024, IMEC reported on area-selective ALD of HfN x (k = 6.4) using vapor-phase dosing of n-undecanethiol (UDT) molecules. 28 Instead of an ordered SAM, a multilayer UDT masking layer was obtained of 3-8 nm in thickness. Their results nicely illustrated the influence of the surface preparation on the selectivity. UDT molecules … WitrynaShibesh Dutta is with imec, 3001 Leuven, Belgium and also with the De-partment of Physics and Astronomy, KU Leuven, 3001 Leuven, Belgium (e- ... Finite Size Effects in Highly Scaled Ruthenium Interconnects Shibesh Dutta, Kristof Moors, Michiel Vandemaele, and Christoph Adelmann F . 2 Figure 1. In-plane TEM images of ~27 … cyclopithecus